Focused ion beam facility

About the Focused ion beam facility

Part of the Zepler Cleanrooms

网络彩票APP下载_澳客彩票网-官方游戏, focused ion beam - scanning electron microscope (FIB-SEM) systems offer nanoscale imaging and milling capabilities for a wide range of applications. The facility supports research in nanoelectronics, nanophotonics, silicon photonics and quantum devices research.

We specialise in rapid nanostructuring of metallic, semiconducting, and dielectric materials and devices. This includes free-standing nanomembranes, multilayer structures and optical fibres.

网络彩票APP下载_澳客彩票网-官方游戏, FIB-SEM systems provide milling resolution down to 30 nanometres (nm) on metal. Additional capabilities include:

  • high-resolution electron microscopy
  • electron/ion beam-induced deposition of platinum
  • chemically accelerated milling of insulators
  • energy-dispersive X-ray spectroscopy (EDS)

For all on substrates up to 100 millimetres (mm) in diameter.

We have two FIB-SEM systems. In a dedicated lab, we have an FEI (Thermo Fisher Scientific) Helios 600 Nanolab Dualbeam?. Inside the nanofabrication cleanrooms characterisation suite, we have a Zeiss NVision40 FIB-SEM.

Technical specification

Equipment

FEI Helios 600 Dualbeam?

in a dedicated lab outside the cleanroom area:

  • 0.35-30 kilovolts (kV) high resolution field emission scanning electron column
  • 0.5-30 kV Ga+ liquid metal ion column
  • SEM imaging resolution: 0.9nm at 15kV; 1.4nm at 1kV
  • FIB imaging resolution: 5nm at 30kV

Detectors and accessories

  • In-lens detector for secondary and back-scattered electrons
  • Everhart Thornley standard secondary electron detector
  • infrared camera for viewing sample/column
  • nanofabrication, linewidth <30nm on metal using FIB
  • gas injection system: platinum (Pt) deposition, xenon difluoride (XeF2) enhanced etching
  • Bruker Quantax 100mm2 EDS
  • automatic 3D slice and view for 3D reconstruction

Connect

Contact us

For more information or to book the facility, please email our facility expert Dr Bruce (Jun-Yu) Ou: